Any of a variety of chemical solution
s used to polish silicon wafer
s using a CMP
. Probably more accurately referred to as colloidal silica
. According to this MSDS
I'm looking at, Brand D Slurry, made by DuPont
, consists of 30-40% amorpous silica
, 0-0.5% titratable alkali
) and 60-70% water
For more information, you can call DuPont at 1-800-441-7515.
In case of a medical emergency, call 1-800-441-3637. And then call 911.